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In this paper, a second-order sliding mode control (2-SMC) scheme, called twisting algorithm, is applied to control an electrostatically actuated 2D torsional MEMS micromirror. The proposed twisting algorithm is able to improve the transient and positioning performance of the controlled 2D micromirror including robustness against model uncertainties and external disturbances. The main advantages of...
In this paper, we will study the output-error-constrained tracking control problem of an electrostatic torsional micromirror beyond the pull-in limit. We will first show that this problem can be formulated as a robust output regulation problem and it further boils down to a robust regulation problem with output-constrained by adaptive internal model design, the solution of which would in turn lead...
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