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The ion beam sputtering (IBS) of smooth mono-elemental Si with impurity co-deposition is extended to a pre-rippled binary compound surface of fused silica (SiO2). The dependence of the rms roughness and the deposited amount of Al on the distance from the Al source under Ar+ IBS with Al co-deposition was investigated on smooth SiO2, pre-rippled SiO2, and smooth Si surfaces, using atomic force microscopy...
This report focuses on the effect of simultaneous Fe incorporation in the self-organized pattern formation on Si(001) by low-energy ion-beam sputtering. Experimental observations giving evidence for the correlation between different ion-beam parameters, Fe concentration on the substrate, and the resulting topography are shown. It was observed that the incorporation of Fe affects the evolution of the...