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This paper investigates the effect of nitrogen ion implantation on surface structure as well as resistance against tantalum corrosion. In this experiment, nitrogen ions which had energy of 30 keV and were in doses of 1 × 1017 to 9 × 1017 ions/cm2 were used. The X-ray diffraction analysis was applied for both the metallic analysis and the study of new structures having been created through the nitrogen...