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In the ubiquitous information age of today there is an increased interest in combining actuating and sensing technology with the advanced signal processing of the well established CMOS technology. With that in mind, this work investigates the possibility of making MEMS resonators in fine-pitch CMOS in contrast to making MEMS in more coarse-grain CMOS processes. This is done by using the metal layers...
This paper demonstrates how micromechanical on-chip MEMS resonators can be used as higher-order mixer-filters in RF front-end WSN nodes. Vibrating FFSFRs (Free-free Square Frame Resonator) connected together can create 4th and 6th order mixer-filter responses. The output is further enhanced by an on-chip amplifier, thus reducing stray capacitances. These mixer-filters are fabricated utilizing a CMOS-MEMS...
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts in an ordinary CMOS process. This procedure has been used to design an oscillator consisting of a resonating cantilever beam and a CMOS Pierce feedback amplifier...
The offshore industry has changed significantly over the last few years, characterised by significant time and cost reduction in offshore developments. Norsok requirements are expected to further speed up this process, placing great demands on all participants in a project. The short article identifies some of the questions facing the safety/risk assessment discipline.
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