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Parylene-C has been extensively used in biomedical devices as a conformal and biocompatible coating. It is also a good material for implantation. Unfortunately, serious delamination between parylene-C and other materials is often found even during standard MEMS processes such as lift-off and sacrificial photoresist releasing. Therefore, surface treatments before parylene deposition that can enhance...
This paper reports the first parylene-C based superhydrophobic films with high or low adhesion for potential droplet-based microfluidics. By creating hierarchical dual-scale micro/nanostructures and applying various plasma treatments, both biomimetic designs of lotus leaf effect with high contact angle and low adhesion, and petal effect with high contact angle but high adhesion, are demonstrated....
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