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This paper presents a novel MEMS single-crystal silicon low-g switch surviving acceleration loads 200 times greater than its designed trigger load. In accordance with beam dynamics theory for survivability to high-g acceleration levels (on the order of 10,000-g's), low-g (<150 g) switches were designed, fabricated and tested. Experiments have confirmed that the fabricated devices trigger in the...
This paper introduces and experimentally validates a new model for near-contact gas damping of microbeams. The model is formulated based on numerical simulations of rarefied gas dynamics using the Boltzmann Ellipsoidal Statistical Bhatnagar-Gross-Krook (ES-BGK) equation. The result is compared with existing models by simulating the motion of beams under high-g acceleration. To experimentally validate...
This paper presents for the first time real-time contact monitoring of packaged high-g switches under acceleration loads up to 50,000 g. Such loads are typical in impact and pyroshock phenomena such as multistage rocket launches and earth penetrating weapons. Contact monitoring is performed using a fully electronic methodology utilizing an ultra low-power (<60 μW) CMOS interface that is directly...
This work presents the first experimental study on the effectiveness of single-crystal silicon (SCS) cantilever arrays as contact-based high-G sensors in digital MEMS accelerometers. Unlike conventional designs, a digital scheme is employed where detection of a specific acceleration level is associated with a group of silicon cantilevers, which deflect and make solid-to-solid silicon contacts with...
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