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This paper presents a novel micromachined piezoelectric generator harvesting mechanical energy over a wide frequency range. According to systematic figure of merit (FOM) analysis, four optimized design devices of cantilevers with proof-masses are selected to be connected in parallel to form a generator of size 3 × 3 × 5 mm. Moreover, the devices are fabricated by an innovative process where the piezoelectric...
This paper presents a novel micromechanised piezoelectric generator harvesting mechanical energy in a wide vibration bandwidth. Based on optimal figure of merit (FOM) and our developed scheme, the size of 3mm times 3mm times 5mm generator is composed of four connected-in-parallel cantilever structures, which are fabricated by an innovative process with the advantages of flexible membrane and minimized...
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