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Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized...
This paper presents the design, fabrication and testing results of a novel in-plane polarized PZT film based micro-acoustic device for ultrasonic applications. The proposed micro-acoustic device with Pt/PZT/TiO2/SiO2 structure can be used for both microphone and microspeaker due to the piezoelectric effect and converse piezoelectric effect of PZT film. The PZT film is polarized along in-plane direction...
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