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This paper is the first to provide a comprehensive study on the layout dependence of scaled Si1-xGex-channel pFETs. Drive current enhancement up to 90% is demonstrated for Si0.55Ge0.45-channel pFETs with LG = 35 nm and EOT = 0.9 nm when the transistor width (W) is scaled from 10 μm to 110 nm. This is attributed to a change in channel stress from biaxial compressive at large W to the more beneficial...
In view of the difficulties in planar CMOS transistor scaling to preserve an acceptable gate to channel control FINFET based multi-gate (MuGFET) devices have been proposed as a technology option for replacing the existing technology. The attractiveness of FINFET consists in the realization of self-aligned double-gate devices with a conventional CMOS process. This allows extending the gate scaling...
In this paper, a comprehensive work toward the understanding of the stress memorization technique (SMT) is presented. The effects of the SMT upon PMOS and NMOS device performance are investigated and explained. A novel low-cost solution for a maskless SMT integration into advanced CMOS technologies is proposed, and additional device results examining the compatibility of SMT with fully silicided and...
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