The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper we introduce NDSE (nanoscale displacement sensing and estimation) technology, encompassing a family of algorithms which estimate image displacements to within a few nanometers using optical microscopy, and to sub-nanometers using an imaging system with sub-optical imaging resolution. NDSE algorithms generally fall into two groups: (1) algorithms based on statistical analyses of images,...
In this paper we discuss the application of NDSE [1] (Hewlett Packard’s nanoscale displacement sensing and estimation technology) as an overlay metrology tool. We describe a method where nanoscale displacement sensing forms the basis of a precision alignment measurement. We will then provide a review of experiments performed to assess the accuracy of one particular NDSE algorithm, tracking silicon...