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A novel contact-enhanced low-g inertial microswitch has been proposed and fabricated by surface micromachining technology in this paper. A novel segmental circle spring has been designed in the low-g inertial switch, which can decrease its stiffness compared with traditional semicircle spring. The dynamic response of the microswitch is simulated by ANSYS software, which has estimated its threshold...
A micro-machined passive vibration threshold sensor (i.e. acceleration switch) with a compliant stationary electrode has been designed, simulated and characterized. Bridge-type elastic beams as the compliant stationary electrode are adopted to improve the contact effect of the sensor. The dynamic contact between the two electrodes is simulated and analyzed by finite-element method (FEM). It is presented...
An inertial micro-switch with a compliant cantilever fixed electrode has been designed and fabricated by surface micromachining technology in the present work. The micro-switch can sense the applied acceleration in one horizontal direction. The dynamic contact process of the inertial micro-switch was simulated by finite element method (FEM). A compliant cantilever was proposed in the inertial system...
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