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Micro-electro-mechanical systems (MEMS)-based tunable optical filters, integrated with an infrared detector, select narrow wavelength bands in either the short-wavelength infrared (SWIR), or the mid-wavelength infrared (MWIR) region of the electromagnetic spectrum. The SWIR microspectrometer is based on monolithic integration of a parallel plate MEMS optical filter with a HgCdTe-based infrared detector...
The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the integration of a MEMS Fabry-Perot filter with the HgxCd1-xTe detector is to keep the processing temperature less than 125 degC. The results show successful device operation with tuning over 440 nm across the SWIR (1.6-2.5 mum) band, lineswidths...
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