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We describe the fabrication process for an anode of a miniaturized transmission electron microscope. The anode consists of a very thin membrane (membrane-anode) that encloses the electron optics microsystem and it is used to separate the high vacuum part from the sample chamber in the microscope. The membrane-anode is made of Si3N4 layer deposited on an oxidized silicon substrate and was fabricated...
This paper describes a microelectromechanical-system-type field emission electron source fabricated as a planar silicon structure bonded with a glass substrate. It consists of a carbon nanotube cathode, beam formation electrodes, and silicon glass vacuum housing, all made in a uniform technological process. The current–voltage characteristics obtained inside a reference vacuum chamber for the two-,...
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