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We describe a systematic study on quantifying the effects of heterostructure layer stacking upon measured dissipation and quality factors (Qs) of AlN-on-Si coupled-ring breathing mode micromechanical resonators. For the first time, we design and fabricate resonators of the same lateral dimensions but with different stacking layers, namely, Si, AlN-on-Si, and Al-on-AlN-on-Si. With both optical and...
This paper reports the first experimental exploration of non-invasive and fast manipulation of breast cancer cells by harnessing multimode micromechanical resonators operating in biosolution. We demonstrate, for the first time, that groups of breast cancer cells are spatially manipulated into controlled microscale patterns, facilitated by the spatially abundant and diverse multimode resonances of...
The active search for candidates of an ideal switching device for low-voltage logic and ultralow-power applications has stimulated new explorations of contact-mode switches (relays) based on micro/nanoelectromechanical systems (MEMS/NEMS). This has been driven by the fundamental advantages that mechanical devices offer, such as ideally abrupt switching with zero off-state leakage, suitable for harsh...
Square poly cry stalline 3C silicon carbide (poly-SiC) thin diaphragms with large aspect ratios (i.e., side length to thickness: L/t ∼ 600) are explored as a structural material for micromechanical resonators. The effects of varying pressure on the characteristics of multiple resonant modes are studied. Load-deflection tests reveal a Young's modulus of EY = 344 ± 13 GPa and a residual (built-in) stress...
Silicon carbide (SiC) is a leading material for both semiconductor devices and harsh environment micro- and nano-electromechanical systems (MEMS/NEMS) due to a combination of exceptional electrical, mechanical and chemical properties. SiC is also an excellent structural material for micromechanical transducers because of its high Young's modulus and mechanical strength. Suspended thin film diaphragms...
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