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We present two new ternary alloy silicides with tunable work function ranging between 4.27eV to 4.7eV and 4.8eV to 5.0eV respectively for dual metal gate CMOS applications. NixTa1-xSi gates were investigated for NMOS and NixPt1-xSi gates were investigated for PMOS applications on SiO2, HfO 2 and HfSiOx dielectrics. A large degree of tuning was observed on SiO2 however the tuning range decreased as...
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