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A simplified method of effective work function (Phieff) control to near the Si conduction band edge (Ec) was demonstrated in the Ni fully silicided (Ni-FUSI) gate/HfSiON system. The Phieff of NiSi (4.51 eV) decreased and saturated at 4.27 eV, owing to the use of an Al postdoping process, in which the implantation of Al ions into the upper part of the Ni silicide gate electrodes was followed by low-temperature...
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