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A piezoelectric accelerometer based on bulk micromachining was presented in this paper. It is composed of a mass block and four cantilever beams with PZT piezoelectric thin films for detection deposited on cantilever beams. In order to realize the multi-axis detection with a single mass block, beam deformations due to the acceleration in X, Y, Z-axis directions were discussed to determine the corresponding...
A new type of tri-axial piezoelectric accelerometer is proposed in this study. It consists of a seismic mass and four cantilever beams that is distributed in a shape of X. Analytical model and FEM analysis were conducted to study its charge sensitivity and the fundamental/first order resonance frequency in the Z-axis, X-axis and Y-axis direction. The errors between the calculated results from analytical...
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