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This paper presents the design, and fabrication of a PZT-driven atomizer based on a flexible membrane and a micro-machined trumpet-shaped nozzle array. Tests were conducted to demonstrate that the developed atomizer can produce fine droplets. The atomizer uses a PZT bimorph plate attached to a liquid-proof HDPE membrane with a low Young’s modulus to generate a pressure wave in the liquid reservoir...
This paper presents a novel micromachined piezoelectric generator harvesting mechanical energy over a wide frequency range. According to systematic figure of merit (FOM) analysis, four optimized design devices of cantilevers with proof-masses are selected to be connected in parallel to form a generator of size 3 × 3 × 5 mm. Moreover, the devices are fabricated by an innovative process where the piezoelectric...
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