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Logic NVM (LNVM) developed in baseline logic processes is gaining more interest from automotive applications. We discuss for the first time how to build such LNVM to achieve and assure automotive-level quality through the product development cycle. We successfully demonstrate that in-field reliability < 1 ppm may be achieved with appropriate layout and architecture selections.
A highly reliable embedded logic multitime-programmable nonvolatile memory (NVM) has been developed in a standard 90-nm logic process with no process changes and a zero-mask adder. By using a novel work-function-engineered tunneling device and 70-Aring tunneling oxide, an excellent endurance of more than 500 k cycles has been achieved. Reliability of the NVM is evaluated against the traditional tunneling...
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