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We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane photonic crystal cavities. We demonstrate free-space and waveguide coupling schemes for the input light, while the readout is provided by an integrated quantum dot photodiode.
We report a novel, fully-integrated nanophotonic wavelength and displacement sensor based on an electrostatically-actuated double-membrane photonic crystal nanocavity detector with a quantum dot absorption region.
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