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A novel approach to solving the robust topology optimization problem under loading uncertainty was developed. According to the superposition principle of linear structure, computational method for the excepted value and standard deviation of the compliance by Monte Carlo sampling is adopted. In order to avoid the computation of the sensitivity of the objective and improve computational efficiency,...
Based on the research of characteristics of the hydraulic servo system, this paper developed a PID controller using LabVIEW to control the core part of the servo system control. A test was made on LabVIEW's own PID VI and the self-written PID VI respectively using a simulation test program. It is found that LabVIEW's own PID VI comes with the following defects: bad tracking accuracy, tracking lag...
Stringent process control become an issue of growing importance in the integrated circuits manufacture. The in-suit monitoring and endpoint detection of very deep submicron meter size polysilicon gate etching is critical to the proper control of plasma etching. Process faults should be detected and corrected before the parts in etching tools are damaged. Real time monitoring with optical emission...
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