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This paper presents a novel test method that uses a laser Doppler vibrometer (LDV) for measuring the thermal conductivity (k) of suspended thin films. Unlike traditional thermal conductivity measurement techniques, the present method also yields the coefficient of thermal expansion (CTE), the Young's modulus E and the residual stress σ0 of the film. The method relies on the absorption of the LDV's...
MEMS based timing devices have been proposed as an alternative to Quartz systems for certain applications. Through using an oven-controlled system it is possible to stabilize the frequency response of such a MEMS system over a large ambient temperature range. This work presents a BAW MEMS resonator in poly-SiGe which achieves significantly lower power consumption for frequency stabilization over temperature...
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