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This paper presents the characterization of frequency response and mode shape at the 1st harmonic frequency of a Micro-Opto-Mechanical Acoustic Sensors (MOMAS) with a Mach-Zehnder Interferometer (MZI) readout system. In previous research, the static modeling and characterization has been demonstrated. In this paper, we investigate the capability of using MOMAS in ultrasound domain as a Micro-Opto-Mechanical...
This paper presents the modelling of a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform. Implemented using a single wavelength Mach Zehnder Interferometer (MZI), it relies on a single readout detector that could be integrated directly on CMOS. Current photonic processes exhibit high residual stresses in the sensitive membrane. In this paper we will focus...
This paper presents the design of Micro-Opto-Mechanical Pressure Sensors (MOMPS), which can exhibit much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. As the output intensity variation depends on multiple design parameters, such as the radius of the membrane, the position of the waveguide, the wavelength and the phase variation due to the opto-mechanical...
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