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A MEMS nozzle device achieved low-temperature atmospheric pressure plasma irradiation for individual treatment of cells. The MEMS nozzle device had cell-trapping and releasing function, which enabled stable plasma treatment. Cells were trapped at the nozzle holes and the nozzle holes defined the area of plasma irradiation. Plasma treatment was performed against polyethylene bead (φ30 µm), lily pollen...
A micro plasma-nozzle device has been fabricated for plasma treatment for a single cell. The micro plasma-nozzle device consists of throughhole and trench structures. The nozzle device was attached to a guide tube (O.D.: Φ1.5 mm, I.D.: Φ1 mm) of an atmospheric pressure microplasma. Once plasma gas was supplied into the guide tube, most of the plasma gas was exhausted through trench structures, whereas...
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