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The work presents a technique for motion amplitude control in MEMS resonators based on a first mechanical contact of two anti-phase driven frames, and then on a consecutive self-adaptation of the frames motion amplitude, that at every cycle skim over one another. This feather contact (FC) technique is demonstrated on a test structure which includes an anti-phase drive mode, with a tuning fork coupling...
The work discusses the effects of vibrations on the performance of rate gyroscopes in terms of Allan variance, and presents the results of vibrations rejection on a Z-axis gyroscope based on piezoresistive nano-gauge sensing elements. In a comparative analysis with a consumer off-the-shelf gyroscope, the proposed device shows a 10-fold better angle random walk (ARW) under no vibrations, and at least...
The work presents a module for earth magnetic field measurements based on four microelectromechanical devices: one out-of-plane and two in-plane differential Lorentz-force magnetometers, and a Tang resonator. The latter is used to provide the reference frequency in off-resonance operation, a way that enables the magnetometers to share the same Lorentz current, giving an intrinsic 3-fold consumption...
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