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The required transition from Control Gate wrap-around to planar structure for NAND flash scaling below 20nm node causes important loss of coupling factor. In order to recover the Programming window, we develop a Hybrid Floating Gate using Ru as high work-function metal. With a proper nitridation of the underlying Si and ALD technique, we obtain a continuous Ru layer as thin as 2nm that is thermally...
Dislocations are at the heart of the plastic behavior of crystalline materials yet it is notoriously difficult to perform quantitative, non-intrusive measurements of their single or collective properties. Dislocation density is a critical variable that determines dislocation mobility, strength and ductility. On the one hand, individual dislocations can be probed in detail with transmission electron...
The pulsed laser deposition (PLD) technique is an excellent method to prepare single crystalline complex oxide thin films. We have successfully grown films for the use in HTS SQUID-devices as well as for thin film optical waveguides. The Josephson junction used in the HTS SQUIDs is formed by a step edge type grain boundary junction. The step preparation is a very critical process in the SQUID preparation...
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