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The fast growth of MEMS technologies for the production of inertial sensors in the last decade makes the characterization at wafer-level very important. In this paper is presented a test setup for measuring electrical and mechanical parameters of capacitive MEMS inertial sensors. The test setup is used in the production for automotive and consumer applications. It is fully electrical (i.e. none of...
This paper presents an innovative and effective method to improve the performance of a micro mechanical gyroscope by introducing the damping of its sensing quality factor. Indeed the sensing quality factor is a key parameter for the micro mechanical gyroscope dynamic; particularly high sensing quality factor means long settling time, high response overshoot and high sensitivity to external disturbances...
The paper presents an advanced digital signal inspector (ADSI) used for acquisition and analysis of the internal digital of a System on Package (SoP) with a limited number of pins. The system is made of a commercial FPGA- board, connected to the module for data sampling and controlled by PC via USB; a suited graphical interface allows for configuration, multi trace real time data display and post...
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