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The paper describes the implementation of optimization routines, in the APLAC programming language to optimize a RF MEMS (Radio Frequency Micro Electromechanical Systems) capacitive switch. The optimization methods were applied to complete the goals in the static regime. The focus of the paper was to create efficient, fast and robust routines for material and geometric optimization of the device....
This contribution proposes a method to extract parametric reduced models that describe the coupled structural-electric behavior of RF MEMS switches. The equivalent capacitance coefficients and the effective elastic coefficients are extracted from coupled structural-electrostatic analysis. Parametric models are built based on the sensitivities of the extracted equivalent coefficients. The method is...
The paper presents parametrized model of RF (radio frequency) MEMS (micro-electro-mechanical-systems) capacitive switch in the form of 1D equivalent circuits, prepared in the APLAC software. The model can be applied to obtain static, multiphysics, nonlinear characteristics and to calculate pull-in voltage of the switch. The parametrization concerns geometrical parameters (beam length and static gap...
This paper proposes a fast and accurate order reduction algorithm for the extraction of compact macromodels for electrostatic actuated micro-electro-mechanical (MEMS) switches used in radio-frequency (RF) applications. The algorithm uses as input the information obtained from field simulations, in which coupled equations of electrostatic, structural-dynamic, air flow and full wave electromagnetic...
This paper investigates the extraction of lumped parameters (elastic coefficient and effective mass) for RF MEMS switches. The extraction starts from field simulations obtained with the finite element method, which solves strongly coupled structural-electrostatic field problems, and is based on least square fitting. The elastic coefficients are extracted from static coupled simulations, whereas the...
This contribution refers to a methodology for the extraction of RF macromodels for electrostatically actuated switches. The extraction is based on the results obtained from three RF simulations carried out at the device-level model, with the finite integration technique, and use of a fitting procedure based on closed form relationships for the TL-lumped macromodel. Two test configurations were studied...
An original object oriented data structure that can be used for a large category of algorithms dedicated to multiphysics simulations is proposed. These data structures and algorithms were implemented in C++ and tested on a model of a capacitive MEMS switch. The final goal is to generate a C++ class library dedicated to multiphysics modelling.
This paper is focused on the extraction process of the radio frequency macromodel for a capacitive RF MEMS switch operating at microwave frequencies, which can accurately describe the RF response of the switch in the Off and On state. The procedure has three steps, first the per unit length parameters of the TL are determined then the Off state capacitance and finaly the RLC parameters in the actuated...
A new improved version of an Intelligent Particle Swarm Optimization (IPSO) algorithm, is proposed and applied for the design of a Superconducting Magnetic Energy Storage device. IPSO offers intelligence to PSO particles by using concepts such as: learning from group experiences, local landscape models based on virtual neighbors and successful behavior parameters. The improvements proposed refer,...
This paper investigates several methods for the extraction of effective elastic coefficients for integrated micro-electro-mechanical switches, to be used eventually in compact macromodels of these devices. The methods are based on the numerical results obtained from the coupled mechanical-electrostatic finite element (FE) simulation of the device. The best method found is based on a cubic least square...
The design of RF MEMS switches is a challenging task due to the various multiphysics coupled phenomena that have to be taken into consideration. In order to reach a configuration with specific requirements, dynamical compact models are needed, that should be accurate enough and have few degrees of freedom, so that the simulation of an entire system in which such a device is embedded need reasonable...
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