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A feasibility study of 70 nm pitch 2-level dual damascene interconnects featuring EUV lithography is presented. Using Ru barrier metal and scalable porous silica (Po-SiO, k=2.1), a low resistivity below 4.5 ????cm and a 13% reduction in wiring capacitance compared with porous SiOC (k=2.65) was obtained. The predicted circuit-performance using Po-SiO was 10% higher than that with porous SiOC. The electromigration...
The resistance of wiring with a width of less than 40 nm was firstly evaluated by using an EUV lithography (lambda=13.5 nm). The resistance was quite high in narrow wiring with conventional Ta barrier film, while a very low effective resistivity rhoeff of lower than 4.5 muOmega cm was obtained by using PVD-Ru barrier film. This difference was attributed to combination of thinner barrier metal films...
This paper proposes a new design technique for a ladder-type filter to reduce the passband width without sacrificing the insertion loss, out-of-band rejection, and steepness of the transition bands. First, it is shown that 2 transmission zeros can be generated by connecting an additional resonator in either series or parallel arm of the ladder filter topology. This new filter topology can be designed...
The fundamental behaviour of AC arc plasma confined by polymer materials was experimentally investigated using a simplified low-voltage test circuit breaker. The arc voltage and arc current were measured to study the influence of polymer and metallic vapour contamination on the arc plasma. Spectroscopic observation and high-speed video measurement were also conducted to determine the behaviour of...
Bearingless motors (BelMs) have two kinds of stator windings composed of motor windings and suspension windings in the same stator. Not only torque but also electromagnetic suspension force can be simultaneously generated in the same stator. Therefore, rotor shaft suspension can be realized without mechanical contacts and lubricant. In addition to advantages of magnetic bearings, the BelMs are expected...
Numerical synthesis of frequency response is discussed for a ladder type filter consisting of ultra-wideband SAW resonators on Cu-grating/15degYX-LiNbO3 structure. For the synthesis, two parameters of each resonator, i.e., the static capacitance and resonant frequency were numerically optimised, while the capacitance ratio and figure of merit were fixed at specific values determined by substrates...
This paper describes the development of extremely wideband and very low-loss RF SAW filters of ladder type for future communication systems. Because of its large electromechanical coupling factor for SH-type SAWs, a Cu-grating/15degYX-LiNbO3 structure was employed as a substrate. At first, four-stage ladder type filter was designed and fabricated, where width/length weighted dummy electrodes were...
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