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In the interest of protecting chip information, it is desirable to break apart a chip based microsystem into unusable fragments of 10–100 μm on demand. Here we report a hybrid polymer-silicon process flow and device architecture that post-processes silicon-based electronics into arrays of silicon pillars. We call this the pillar-on-polymer (PoP) process flow. The pillars can be then individually separated...
We report, for the first time, arrayable self-contained transient micropackets as building blocks to realize vaporizable electronics. Transience is controlled by a one-shot micro-valve, with 2.2 mJ trigger energy, 15.4 msec trigger-time and 100% triggering yield, which exposes nanoliter reactive rubidium droplets to air. The oxygen in air oxidizes the rubidium exothermically, generating heat that...
Characterization of physical and chemical properties of organic thin films such as polycarbonates is essential for their application-specific design. In this paper, we report a novel micromechanical resonant membrane platform with both graphene resistivity and mass-dependent frequency sensing to measure the thermal response, vaporization, and subsequent mass change of thin-film analytes deposited...
One-shot micro-valves are key to applications that require leak-proof sealing of micro-cavities before they are irreversibly triggered to expose the cavity content to the outside environment. Here, we report a novel micro-scale one-shot valve made of graphene transferred on to silicon-nitride (SixNy) membranes. The valve triggers thermo-mechanically in 15.4±3.9 msec consuming 142.1±13.5 mW electrical...
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