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This paper presents a high-power energy-harvesting device based on a three-ports electrostatic comb-drive mechanism. A symmetric electrodes structure is used to reduce the binding electrostatic force, thereby allowing large displacement of the oscillator mass at a low acceleration. With an acceleration of 0.27 G at 125 Hz, output power of 150.3 μW was obtained, where mechanical stroke of over 209...
We have developed a broad-band vibrational energy harvester by utilizing symmetrical comb-drive electrodes that were coated with solid-ion electrets made of potassium-doped thermal silicon oxide film. The device was sealed in a vacuum package for high energy conversion to eliminate mechanical losses. With this device, we capture vibrations of any frequency as well as of impulse motions for power generation.
We propose a high power-output vibrational energy harvesting based on ionic liquid. Ionic liquid enables very large capacitance (1.0–10 µF cm−2) on the electrode at bias voltage less than 1.9 V due to its extremely thin (∼ 1 nm) electrical double layer. By mechanical squeezing and drawing the ionic liquid, that was solidified with a polymer additive, between a pair of electrodes at 15 Hz, we stably...
A successful approach to drastically reduce or even completely eliminate friction and wear in scanning force microscopy is the use of electrostatic modulation of the normal force acting on the tip-sample contact. In this paper we have devised, fabricated and experimentally characterized a novel electrostatically actuated AFM probe. The probe consists of a flexible cantilever that has an electrostatic...
In this paper we present the design, fabrication and test of a MEMS resonator including a field emission gauge for the measurement of the resonator movements. The device is made of an in plane vibrating structure containing electrostatic actuation electrodes as well as a dual tip field emission structure. One tip is fixed where the other, standing about one micron in front of it, is attached to the...
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