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This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in...
Dual-gate IGZO TFTs fabricated using high-k dielectrics deposited via ALD at low temperature (< 180°C) are proposed for chemical and biosensor applications, leading to an investigation of suitable passivation films for such devices. Both PECVD and ALD films are considered for the passivation layer, which also serves as the liquid sensing gate, and it is found that ALD TiO2 offers a sensitivity...
This work presents mass-sensitive hammerhead resonators with integrated recesses as a gas-phase chemical microsensor platform. Recesses are etched into the head region of the resonator to locally deposit chemically sensitive polymers by ink-jet printing. This permits the sensing films to be confined to areas that (a) are most effective in detecting mass loading and (b) are not strained during the...
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