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We have developed a diamond SAW resonator capable of operating at frequencies over 3 GHz using a SiO2/ interdigital transducer (IDT)/AlN/diamond structure. This structure is expected to have a high Q value and a zero temperature coefficient of frequency (TCF) over 3 GHz, based on the high acoustic velocity of AlN. The SAW characteristics of various layered structures composed of SiO2/IDT/AlN/diamond...
SAW characteristics of various layer structures of SiO2/IDT/AlN/diamond substrates that employ 2nd mode of wave (Sezawa mode) were studied both theoretically and experimentally. It was found that the SiO2/IDT/AlN/diamond substrate would allow using thicker metal IDT in SAW device designs than other SAW substrates and also would have zero TCF characteristic at room temperature. SAW phase velocity and...
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