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This paper presents NEMS gas sensors implemented in a breakthrough multigas analysis system. The NEMS mass sensors are collectively fabricated, functionalized and packaged at wafer level. NEMS array resonators exhibit good frequency stability (Allan deviation <5.10−7 in air). After implementation in the multigas analysis system, the capability to analyze complex gas mixtures for Industrial and...
This paper presents theoretical study and experimental results of fully integrated thermally actuated diaphragm. Finite element method (FEM) has been used to simulate and optimize the performance of the actuated diaphragm. It predicts the deflection behavior under definite power actuation and pressure. Heat transfer analysis is conducted to evaluate temperature field distribution. Some structures...
This paper presents a new method to evaluate piezoresistive coefficients of polysilicon in the case of N-doping but valid for other types. We measured and simulated the mechanical stress profile distribution along a bossed membrane using several gauges placed along the radial axis of round membranes. Pressure was applied to the membrane. The electromechanical characterizations of the MEMS membrane...
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