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Nanoenergetic materials are the key to great advances in microscale energy‐demanding systems as actuation part, igniter, propulsion unit, and power. An important challenge of energetic materials for microelectromechanical system (MEMS) is the compatibility of standard microsystem techniques with technology process employed in preparing energetic materials producing a large amount of gas and heat....
Semiconductor bridge (SCB) has been widely used for both military and civilian igniting application for its improved performance in terms of high safety, low ignition energy, short ignition time and its integration into the digital circuits. Here we report the temperature and heat variation laws of bridge area on SCB under the constant current via infrared thermal imaging. The results indicate that...
Recently micro-energetic devices by integrating the energetic materials into micro-electromechanical systems (MEMS) to meet the requirements of energy and function diversity have attracted attention from many researchers. Here the technology of modified electrochemical corrosion which is fully compatible with standard microelectronic manufacturing is reported and used to prepare the porous silicon...
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