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A wide voltage range charge pump is designed in 0.13 μm CMOS technology to provide biasing voltages for MEMS resonators. The pump provides an output range of 32.6 V, from −16.1 V up to 16.5 V, by using four different charge pump cells based on cross-coupled voltage doublers. Two cascaded negative charge pumps and two cascaded positive charge pumps with enhancements to breakdown and high voltage tolerance...
This paper presents the design of the interface circuit for a novel MEMS-based vacuum measurement system topology. The system is designed to target a vacuum range from 10 to 1200 mbar , providing a theoretical pressure resolution of 2 mbar over the temperature range from C to 60 C. The proposed circuit is designed and fabricated in an IBM 0.13-m CMOS process. Measurements...
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