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A MEMS bulk micromachined vibratory gyroscope is designed and fabricated in a commercial and low-cost SOI technology — MEMSCAP SOIMUMPs. The device was carefully designed to mitigate micro-fabrication limitations, while achieving high performance. Theoretical analysis of the drive and sense modes was performed in order to reduce the crosstalk between them, while still using a simple gyro structure...
This paper reports on the design and suggested fabrication steps of a bulk mode dodecagon disk gyroscope. A major contribution of this work, compared to prior art, is that it enables the fabrication of this important class of gyroscopes in commercially available and low-cost SOI technologies — e.g. MEMSCAP's SOIMUMPs. The structure was simulated using COMSOL, operates at 8.14 MHz, and exhibits a competitive...
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