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A phase locked loop (PLL) for MEMS horizontal scanning control of micro-laser projection ASIC is demonstrated for pico projectors application using high voltage 0.18-μm CMOS process. Special design techniques of phase frequency detector(PFD) and VCO control voltage with resetting are proposed to achieve resetting initial phase of horizontal scanning control, which make sure the PLL have stable performance...
High Voltage pulses are required to actuate the MEMS for obtaining the desired performance. Charge pump based circuits are used for obtaining the required high-voltage conversion. However, many such stages need to be connected in series for achieving the required voltage gain. Thus, a two-stage boost converter is used to achieve 3.3V to 80V conversion. The PWM controllers are designed in 0.18 μm CMOS...
This paper presents the design and implementation of digital interface for micro mirror projection ASIC for MEMS scanner control and sensing. The design includes a microprocessor for sensor configuration, MEMS control registers access and video interface for providing scanning and synchronizing signals. It has been fabricated on 0.18μm high voltage CMOS process, and silicon proves the full functionality...
Circuits for sensing the two-dimensional (2-D) position of a dual-axis scanning micromirror are presented together with closed-loop actuation circuits based on the phase-locked-loop for driving the resonance-mode horizontal scan. A frequency-multiplexing chopper stabilization scheme is used to detect horizontal (X) and vertical (Y) position information separately from the single sensing node shared...
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