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We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with...
We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. Ni mirror chip for focusing and detecting X-rays is fabricated utilizing LIGA process (SR lithography and electroforming). In this time, in order to improve the detection efficiency of X-rays, fabrication process is improved. Especially, it keeps by liquid immersion from development process...
X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two...
We have been developing novel microelectromechanical systems X-ray optics for future satellites. It can be ultra-lightweight and of high-resolution. For the first time, we fabricated a spherical test optics made of silicon. We used the dry etching and hot plastic deformation method. We conducted imaging tests to examine whether it can focus a parallel beam of light. Visible light was selected instead...
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