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In this paper the calculation of values of resonance frequencies of the thin disk that have being provided for the ZnO thin disk and operating in the non axis symmetric radial vibration mode. Obtained results were compared with FEA analyses and experimental one presented in [1].
The method of the thin piezoceramic MEMS disk resonator with asymmetric electrodes and supported to the substrate with mounting that has a circular segment form radial oscillation calculation is given in this paper. The zero approximation asymmetric radial vibration of the disk was simulated for case of four beam mounting and tree asymmetric electrodes.
In this paper main characteristics of a piezoceramic bandwidth filter that is used radial oscillations for its work calculation method is proposed. Also there are considered influence of next parameters: distance to second electrode, first electrode width and electric load value. MEMS bandwidth filter designing are given.
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