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Based on the subsurface damage model and the material removal rate of K9 glass in HF acid solution, a fast method was proposed to calculate a set of parameters to characterize the subsurface damage of a polished sample. When micro cracks of the etched sample's subsurface can be clearly observed, by using image processing, lengths, widths, angles, densities of the micro cracks can be calculated and...
To characterize the subsurface mechanical damage (SSD) of the polished optics, the material remove rate of the polished K9 glasses based on HF acid etching was investigated. The etching of optics is assumed to be isotropic, a polished K9 sample with special designed pattern was tested to find out the constancy of etching rate versus time. As the etching rate was determined, the polished samples were...
The existence of the subsurface damage of high-precision components is becoming a bottleneck for better performance of high-precision components in the fields of energy, space, national defense equipment, integrated circuit, MEMS and so on. So far there is still no method which is capable of characterizing the 3D topography of subsurface fractures, and this paper presents an idea of investigating...
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