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The design procedure for a new decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage is presented in this paper. The designed XYZ stage owns a compact structure constructed by three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling...
This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate...
The design procedure for a totally decoupled XY flexure parallel kinematic manipulator is presented in this paper. The designed XY stage is featured with flexure hinges and a relatively simple structure. The output decoupling is allowed by the employment of compound parallelogram flexure, and the input decoupling is implemented by actuation isolation which is enabled by the double compound parallelogram...
The requirements of micro/nano scale manipulation have stimulated the activities around the design and development of new micromanipulators with ultrahigh precision recently. A novel compliant parallel micromanipulator (CPM) with 3-PRC architecture has been proposed in previous works of the authors. However, it has been found that there exist some drawbacks in the preliminarily designed CPM in terms...
The dynamics of a 3-PRC (three-prismatic-revolute-cylindrical) compliant parallel micromanipulator (CPM) is investigated in this paper, which is quite necessary once the high frequency control is concerned. By expressing both potential and kinetic energies of the CPM with the chosen generalized coordinates, the dynamic equation is established through the Lagrangian approach. And the dynamic model...
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