Search results for: Stephen M. Heinrich
Advanced Micro and Nanosystems
Advanced Micro and Nanosystems > Resonant MEMS > Fundamentals > 1 - 28
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 848 - 860
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 38 - 49
Journal of Microelectromechanical Systems > 2011 > 20 > 4 > 788 - 790
Sensors & Actuators: A. Physical > 2008 > 141 > 1 > 43-51
IEEE Sensors Journal > 2007 > 7 > 2 > 230 - 236
Journal of Microelectromechanical Systems > 2007 > 16 > 1 > 44 - 49
Microelectronics Reliability > 1997 > 37 > 8 > 1283