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In this work a causal P-matrix method for leaky SAW(LSAW) devices and the determination of the thereto needed COM-parameters slowness s and reflection r are presented. As a consequence of causality s and r in general are complex. The imaginary parts of reflection and slowness are interpreted as the exchange of energy between SAW and BAW. A relation of energy conservation between imaginary parts of...
Accurate simulation of SAW devices requires accurate material tensor data. However, literature values are in most cases measured on certain engineered test devices and do often not reflect real world production processes with the necessary accuracy. In this work, a parameter identification method is outlined, which can be used to estimate material parameters from admittance measurements of resonators...
In order to reduce the sensibility of SAW components to surface contamination and avoid short cuts between electrodes, anodic oxidation is employed to passivate the electrode with a thin dielectric layer. This layer covers the electrodes, but not the regions between electrodes. Since for these structures, only part of the electrode/substrate interface carries charge, the efficient standard ab inito...
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