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We propose a two-step oxidation with high-pressure oxidation and low-temperature oxygen annealing to form ideal Ge/GeO2 stacks based on thermodynamic and kinetic control. The capacitance-voltage (C-V) characteristics of Ge/GeO2 MISCAPs with two-step oxidation revealed significant improvements of electrical properties, and the interface states density (Dit) estimated with a low-temperature conductance...
We have demonstrated very high electron mobility in Ge n-MOSFETs which exceeds the universal one in Si-MOSFETs. The peak electron mobility on Ge n-MOSFETs is about 1100 cm2/Vsec in Al/GeO2/Ge stack. This has been achieved by taking care of Ge/GeO2 channel interface based on thermodynamic and kinetic control. Since it is clarified that the mobility is still limited by remaining scattering sources,...
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