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Photoresist-based polymer-ceramic composites are proposed for single exposure, direct deep X-ray lithography fabrication of dielectric resonator antenna arrays in thick layers. DRA elements based on fabrication in a 2.3 mm thick SU-8/alumina microcomposite layer are combined in a 3×3 antenna array to demonstrate an increase in gain from 5.5 to 13.6 dB at 23 GHz. A second ground plane can be used to...
X-ray lithography fabrication has the ability to produce high-aspect ratio structures with smooth side walls and precise lateral details. Air-gap Standing Parallel Strips waveguide and related microwave circuits and antennas are a new approach to employ these features, providing low loss microwave circuits that are highly attractive for high frequency and millimeter-wave applications. In this work,...
In this paper, radiation properties and impedance characteristics of lithographically patterned SU-8 structures are discussed. X-ray lithography fabrication process and excitation method of SU-8 resonator antennas are reviewed. Wide band operation is examined by merging the resonances of the SU-8 resonator antenna and an aperture antenna. Reflection coefficient measurement of fabricated antennas is...
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