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In this paper, multiple approaches were attempted to improve the performance of PECVD SiO2/Si3N4 double-layer electrets on glass, including different electrode structures, as well as various corona charging conditions. Both chargeability and charge stability of the PECVD SiO2/Si3N4 double-layer electret at high temperature and high humidity were investigated. It is proven that samples with both lower...
In this paper, charge decay of PECVD SiO2/Si3N4 double layers electrets with different thicknesses of Si3N4 under different environmental conditions was investigated. Single layers of PECVD prepared SiO2 and Si3N4 were also studied. Double layers electrets exhibits better charge stability than single layer under different conditions. As for the double layers with 2 nm-100 nm Si3N4, their charge stability...
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