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Discrete track media (DTM) has been widely studied recently as a solution to achieve high track density for hard disk drives. In DTM, nano-patterning process is used to isolate magnetic tracks. During the fabrication process, magnetic damage occurs in the resist striping process using O2 plasma. The on-track SNR of DTM degrades by ~ 2-3 dB. We used Ar IBE cleaning process to remove the oxide layer...