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Before fabricating the ordered product, an automated production system needs to evaluate its capacity in order to make the products in time and guarantee a deadlock-free manufacturing process. It is important to pre-evaluate the flexibility and agility of the automated production system and also simulate the system operation for the customized variety products in quick response and completely prevent...
Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate them. This paper addresses their real-time control issues. A Petri net (PN) model is developed to model them. This model describes the robot activity sequence with robot waits included. Via this model, to operate a cluster tool is to determine robot wait times and a two-level operation...
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