The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper presents a new approach towards the development of a free-breathing micro-spirometer system on a single chip for point-of-care (POC) diagnosis of lung diseases. In this paper, we take the first step by designing and implementing a cantilever array chip using a standard micro-electromechanical system (MEMS) process. Each cantilever beam is incorporated with capacitive electrodes for sensing...
This paper presents a 90-nm CMOS, ultra-low power frequency synthesizer dedicated to implantable smart medical devices. A new supply regulated LC-VCO that reduces the impact of process variations and temperature on current consumption and phase noise is proposed, as well as a new single-ended charge pump architecture that offers very high output impedance over a wide output voltage range. The frequency...
This paper discusses the issues related to testing MEMS resonators, and suggests ways to mitigate the associated difficulties. Vacuum test conditions and their effect on the quality factor of a resonator are discussed. A custom-built vacuum system is described to simplify testing, and to avoid packaging at early stages of device characterization. Issues regarding the biasing and power handling of...
This paper concerns the design and fabrication of new transducer movers dedicated to 3D ultrasound sensors. Our MEMS-based movers were designed using CoventorWare finite element software to maximize the sector and rotation scan angles. These movers are fabricated on silicon wafers using the standard PolyMUMPs process. The design includes both a scanner actuated using four trapezium electrodes and...
In this paper, the development of a micro electromechanical scanner incorporating high frequency ultrasound transducer operating at 3.5 MHz is presented. We describe the structure and analysis of a microsystem that can be used as a scanner in based medical imaging system. The scanner consists of a rectangular platform attached to a frame actuated using four trapezium electrodes. The behavior of the...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.